E-cell Evaporator
M/N:The1-ECE1
01. Feature of E-Cell Evaporation System
- Deposition thickness : Customer specified
- Deposition material : Organics, Metals & Oxides films
- Film thickness uniformity : ≤ ± 5 % on 4" substrate
- Deposition : deposition by effusion cell and plasma cell
- Throughput : up to 4" substrate x 1 sheet / batch
- Vacuum : Ultimate pressure 5.0 x 10-6 Torr
Base pressure 3.0 x 10-5 Torr - Vacuum chamber : process chamber
- Control system : Manual control
- Purpose : Research and development
02. Options
- Substrate mask holder
- Substrate Rotation
- Turbo Molecular Pump
- Thickness Monitoring Unit
- Effusion cell
- Plasma cell
